Mask Blanks Inspection and Review System
MAGICS Series M6750/M6751
Mask blank inspection and review system detecting defects on photoresists with high sensitivity
Features
- MAGICS series model delivering high sensitivity required for high-quality mask blank inspection and high throughput suitable for outgoing and incoming inspection at production facilities
- Multi-beam scanning method using 63 beams with confocal optics, the core technology of industry-standard MAGICS, combined with high S/N detection circuitry attuned to resist defects
- High sensitivity to defects on resists, enabling high-level and speedy process improvement
- M6751 can perform particle inspection on the latent image of patterns after writing or baking, in addition to line & space pattern inspection, providing an effective process management tool for mask shops
- Compatible with a variety of cassettes including multiple-slot cassettes (for blank manufacturers), RSP, and MRP (both for mask shops)
Applications
- Inspection of resist coated mask blanks, mask substrates, Cr films, MoSi films, halftone films, and masks with the latent image of patterns after writing or baking
- Defect review
