The MAGICS series has been recognized as the de facto standard tool of mask blank inspection for many years, earning high reputation and confidence among customers around the world. MAGICS models have been widely used for outgoing inspection at mask blank manufacturers and for incoming inspection and process management at mask shops.

EUV mask technology has been making advancements recently, including the introduction of new mask architectures, to enable the further scaling of device geometries. Amid this trend, mask blank inspection also needs to achieve higher performance and better functionality. In order to meet this next-generation need, Lasertec has developed M9750/51, leading-edge inspection systems that provide the high sensitivity required for the defect inspection of advanced EUV mask blanks and substrates².

Drawing on the core technology of MAGICS, M9750/51 have achieved significantly improved sensitivity in the detection of minute defects by introducing newly designed inspection optics and adopting high-speed inspection circuitry from our patterned mask inspection systems. M9750/51 have also introduced a high-precision XY stage for greatly enhanced defect coordinate accuracy to enable defect mitigation during EUV mask manufacturing.

We have already received many inquiries and won multiple orders for M9750/51. Lasertec remains committed to facilitating the quality assurance of next-generation high-end mask blanks, as well as to improving incoming inspection and manufacturing process management at mask shops.