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EUV

Description

EUV is an abbreviation of Extreme Ultraviolet. Exposure light source.
Light wavelength: 13.5nm

Related Product
ACTIS A150
ACTIS A150

World’s first EUV patterned mask inspection system

ABICS Series E120
ABICS Series E120

Detecting printable phase defects and enabling defect management for EUV mask blanks

MATRICS X8ULTRA Series
MATRICS X8ULTRA Series

Mask inspection system for pellicle-less EUV mask and optical mask inspection in the technology nodes of 7nm, 5nm, and 3nm

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Product Search

Product list
Semiconductor-related
FPD-related
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Related information
Glossary

A collection of technical words often used with Lasertec products and technologies

Exhibitions

Schedule of events where Lasertec will exibit products

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