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Mask Substrate

Description

Glass substrates that are used in manufacturing mask blanks. Typical mask substrates have the size of 152mm square with 6.3mm thickness, and are made with quartz.

Related Product
MAGICS Series M9650/M9651
MAGICS Series M9650/M9651

Semiconductor mask blank inspection and review system for the cutting-edge technology node of 5nm and beyond

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Glossary

A collection of technical words often used with Lasertec products and technologies

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Schedule of events where Lasertec will exibit products

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