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Products

ACTIS A300 Series
MATRICS Series
BASIC Series
High Sensitivity Under-layer Defect Inspection and Review System CIRIUS Series
Wafer inspection system for the advanced requirements of next-generation process
High Sensitivity Wafer Edge Inspection System CIEL Series
SiC Wafer Inspection and Review System SICA108
Contributing to yield improvement in production
GaN and Compound wafer inspection and review system GALOIS211
OPTELICS HYBRID+
ECCS B320
MAGICS M9650/M9651
ABICS Series E320

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Semiconductor-related

Mask-related systems (EUV) / Mask-related systems (DUV) / Wafer-related systems

FPD-related

Mask-related systems (FPD)

Microscopes

Laser microscopes / Lithium Ion Batteries / In-Situ Observation at Ultra High Temperature Confocal Scanning Laser Microscope

Related information
Glossary

A collection of technical words often used with Lasertec products and technologies

Exhibitions

Schedule of events where Lasertec will exibit products

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