OPTELICS HYBRID+

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Find the best solution to your need by choosing what you want to do from the selections below.

Observation

Perform high-definition color image observation.
Observe high-resolution images at high magnification.
Observe nanometer-scale topographic features.

Measurement

Perform high-precision measurement in a large field of view.
Perform high-resolution measurement at high magnification.
Perform measurement on a sample with large height differences.
Perform nanometer-scale topography measurement.
Measure the nanoscale thickness of transparent films.

Automated operation

Perform multiple-point measurement in a short time.
Inspect the entire surface of a sample, classify defects, and review them.
Perform defect inspection on a patterned sample.
Perform fully-automated wafer inspection and review in a production line with a transfer system.

Software

Optimize measurement conditions quickly.
Perform optimal noise filtering.
Write a readable report containing measurement results.
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