Measurement and analysis functions

2D measurement

Width and pitch measurement

This is a function to show a brightness profile for a line freely chosen on an image and perform line width measurement with high precision. By setting a slice level, you can measure line width with finer resolution than the distance between two pixels. It is useful for performing measurement on a flat high-contrast sample such as a photomask.

In the example below, the pitch of a reference pattern is calculated from its brightness profile.

Standard pattern Slice level Brightness profile

2D measurement

This is a function to calculate distances, angles, and roundness two-dimensionally in a captured image. Measurement can be performed easily using outlines.

In the example below, line width measurement is performed on a printed circuit board.

Copper wire on printed circuit board

XY coordinates measurement

This is a function to measure the distance between two distant locations without using the patchwork function. To use this function, you register a point at the center of FOV as the start point of measurement, then move the FOV to another point at a distant location and register it as the end point of measurement. In this manner, you can quickly measure the distance between two points that are not located in the same FOV.

In the example below, the distance between two points on a printed circuit board is measured (approximately 40,000µm or 40 millimeters).

Start point End point

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