OPTELICS HYBRID+

Specifications

Model Basic model C3 Standard model L3 High-end model L7
Function
  • White light confocal
  • White light confocal
  • Laser confocal
  • White light confocal
  • Laser confocal
  • Differential interference contrast observation
  • Optical interference measurement
  • Spectroscopic reflectometry film thickness measurement
Light source Xenon / LED
Laser - 405 nm
FOV / Magnification Light source Objective lens 24-inch screen magnification FOV (HxV)
White light 18.5×
15,000 × 15,000 μm
2.5× 46.2×
6,000 × 6,000 μm
92.5×
3,000 × 3,000 μm
10× 185×
1,500 × 1,500 μm
20× 370×
750 × 750 μm
50× 925×
300 × 300 μm
100× 1,850×
150 × 150 μm
150× 2,775×
100 × 100 μm
Laser 50× 1,850× -
150 × 150 μm
100× 3,700× -
75 × 75 μm
150× 5,550× -
50 × 50 μm
Zooming 1×~8×
Frame memory Brightness 1,024×1,024×12 bit / High definition mode 2,048×2,048×12 bit
Height 1,024×1,024×16 bit / High definition mode 2,048×2,048×16 bit
Frame rate 15 Hz~120 Hz
Width measurement Minimum unit of measurement 0.001 μm
Accuracy ± [ 0 .02 × (100/Objective lens magnification)+L /1000 ] μm
Repeatability(3σ)*1 10 nm
Height measurement Scale resolution 0.05 nm
Accuracy ±(0.11+L/100) μm
Repeatability(σ)*2 10 nm
Measurement range*3 7 mm
Z stroke 100 mm 80 mm
Nosepiece 5-hole motorized revolving nosepiece (with auto lens position recognition)
XY stage Manual -
Motorized Options
Differential interference contrast observation Options
Vertically-scanned white light interferometer Options
Phase shift interferometer Options
Spectroscopic reflectometer measurement Options
Software Image capture HDR mode, Patchwork, multi-gain, etc.
Image processing Surface shape correction (tilt, spherical), noise elimination, filter, color extraction, binarization, etc.
Profile analysis Profile measurement, comparison measurement, surface roughness measurement, width and pitch measurement, film thickness measurement
Data output Dedicated extension, general use image file, CSV file, STEP file
Efficiency tool M Carte, filter assist, macro function, surface roughness suggest, Office report
Utility AC:100 V 50/60 Hz approx.800 VA
Dimensions and weight Microscope unit 382(W) × 511(D) × 689(H) mm approx.40 kg
Control unit 430(W) × 450(D) × 100(H) mm approx.7 kg
Light source unit 142(W) × 279(D) × 210(H) mm approx.3.8 kg
Lamp house 142(W) × 311(D) × 227(H) mm approx.6.7 kg
PC 175(W) × 440(D) × 360(H) mm approx.9 kg
Monitor 556(W) × 180(D) × 513(H) mm approx.4 kg
Traceability
  1. *1Based on reference pattern measurement using 100x (NA0.95) under no vibration condition.
  2. *2Based on the measurement of VLSI Standards' step height standards using 100x (NA0.95) under no vibration condition.
  3. *3Up to the maximum distance of objective lens movement

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